Influence Of Target Current And Gas Flow On Structure And Optical Properties Of Titanium-Containing Film

With a view of exploring the influence of technological parameters such as target current and gas flow on the structural and optical properties Titanium-containing films, series layers of Ti-DLC(Titanium-containing) 、TiN and TiC films were deposited,respectively. This article explored the change of film structure and optical property under different target current and gas flow. The result shows that:(1)For Al/Ti-DLC/DLC absorbing films, the transmittance of the DLC antireflection layer was involved with the ratio of sp~2-C/sp~3-C and the surface roughness of the film. A rise of the C-target current and Ar flow induces induced a first initial rise and then a drop of the film transmittance. the absorptance of the Ti-DLC layer was mainly concerned with affected by the ratio of sp~2-C/sp~3-C in the film. A rise of Ti-target current induced a gradual drop of the content of sp~3-C bonds and a increase of sp~2-C bonds in the absorbing layer. When the Ti-target current exceeded a critical value, a further rise of the Ti-target current had an influence on the surface roughness of the absorbing layer, resulting in a reduced absorptance.(2) The surface of the deposited TiN film preparing by medium-frequency dual-magnetron sputtering system was smooth, colorful TiN thin film could be deposited on the substrate at room temperature rich, including the color of silvery white, pale yellow, golden yellow, orange and middle color, etc. The color of the TiN thin film was directly related to the titanium and nitrogen elements in the film. With the increase of the Ti target current, the ratio of titanium atoms and the thickness of the TiN film were both increased. It was reflected on the color of the film is the variation from orange to golden yellow and then to silvery white; With the increase of the N2 flow, the ratio of nitrogen atoms was increase, The thickness of the film is stable initially and then decreased obviously. It was reflected on the color of the film is the variation from silvery white to golden yellow and then to red.(3)When TiC thin film was deposited by medium-frequency dual-magnetron sputtering system, different parameters of the Ti target current and acetylene flow would significantly affected the structure and performance of the film. With the increase of the Ti target current, the L value and the a value increased, the b value deceased unobvious. The reflectivity and the thickness of the film were increased, and the roughness was decreased. The TiC film was black; With the increase of the acetylene flow, the L value and decreased, the a value initially increased and then deceased, the b value unobvious and floated at the value of 0. The reflectivity of the film was decreased, and the thickness of the film was initially increased and then decreased. the roughness of the film,which was on the contrary, was initially decreased and then increased. And the TiC film was black.