Research On Laser-induced Damage In Quartz Glass By UV Laser

In this paper, the mechanisms of ultraviolet laser(UV laser) induced of quartz glass are given by the numerical calculation analysis method and the experimental method. The numerical calculation analysis method has impact on the 1064 nm laser, 355 nm laser and 266 nm laser induced of quartz glass. The transient of temperature and thermal stress by the three laser wavelengths irradiated quartz glass are investigated,the effects of the laser wavelength and laser energy factors and other factors are analyzed. The quartz glass of temperature and thermal stress were increased with laser energy. The 1064 nm laser, 355 nm laser and 266 nm laser induced damage threshold of quartz glass were given. The experimental method has analyzed 355 nm laser and 266 nm laser induced of quartz glass, the 355 nm induced damage threshold of quartz glass were given. The 355 nm laser-induced damage threshold of the quartz glass was improved by HF acid treatment, optical transmission and damage threshold of quartz glass were improved by optimizing the HF concentration and acid etched time, which shown that optical transmission and damage threshold were increased with the HF concentration and acid etched time then decreased. The experimental results shown that the laser induced damage threshold of quartz glass at the experiment conditions of the 10% HF concentration and etched time 60 minutes was 1.9×109W/cm2 and improved 167.61% compared to the previous acid treatment. The surface damage morphology of quartz glass induced by same 355 nm laser and 266 nm laser fluence action with/without HF acid etching was comparative analyzed,The laser-induced damage radius and damage depth of the quartz glass with/without acid etching is investigated. Finally, the improvement mechanisms of laser-induced damage threshold of quartz glass after the HF acid treatment were given.In this paper, the results may provide theoretical and practice base by the numerical calculation model of finite element analysis method of quartz glass irradiated by laser, as well as the results may provide theoretical base for development and application scope of UV laser technology.