Study On The Detection Performance Of Ammonia Concentration Based On Indium Oxide Thin Films

Indium oxide is getting extensive attention as new sensitive material. Mainly because pure indium oxide is sensitive to many kinds of gas, and it can further improve gas sensing property by the doping process. At present the detection of ammonia can not be ignored for the severity of ammonia pollution. Then it is very important for the development of low-cost, high-performance ammonia-sensitive element. Nowadays indium oxide is more active metal oxide materials in the preparation of ammonia-sensitive component. It has a good response to ammonia. Therefore, indium oxide is used as ammonia-sensitive element and doping methods is also used to improve gas sensing performance.The sol-gel method is used to composite colloform, which is spin-coated on a substrate and sintered a film. Proper experimental conditions is determined by characterizing, we find that particles of indium oxide film are well-distributed and smaller size at pH=5 and the annealing temperature of 550°C. The doping 5% of molybdenum ions can improve the sensitivity, selectivity and reduce the response time, which has good gas sensing performance.