The Study On The Micro Sensing In Metamaterial Based On Resonant Cavity Principle

Metamaterial is a new artificial composite material with electromagnetic characteristics, whose size is far smaller than wave length. It is widely used in sensor because of its extraordinary electromagnetic characteristics. It can enhance the positioning of electromagnetic field, thus improving the sensitivity and resolution of sensor, which create a new space of sensor design. In this paper, based on resonant cavity principle, analyzes the application of metamaterial in sensor and testifies values with finite element method.The main content are in the following three parts:First of all, based on the transmission theory of parallel-plate waveguide (PPWG), this paper refers to the micro sensor of rectangular slots of multiband terahertz Metal-Dieletric-Metal (MDM) and round ones of resonant cavity. It analyzes the influence to MDM waveguide transmission spectrum of the slot size, amount and its medium to the resonant frequency. The author chooses the distance between the slots which can ignore the interference. More intuitionistic medium parameters and resonant frequency graphs are achieved by MATLAB numerical evaluation, and then the relationship of medium parameter and resonant frequency can be obtained by finite element analysis software COMSOLMultiphysics. Thus the refractive indexes of resonant frequency and inside medium of the two slots almost have a linear relationship.Secondly, According to the transmission theory of zero refractive index material (ZIM), this paper introduces the full reflected and impregnated micro sensor with medium perturbation. Intended experimental results will be available, by adjusting the size of structure, parameter of medium and the amount of inside structures. By MATLAB value calculation, more direct and relative ideal relationship graph of medium parameter and resonant graph can be obtained. Based on the graph, the most optimized data is brought into stimulation test by finite element analysis software COMSOL Multiphysics and high frequency structure simulator (HFSS).The result of the study show that different shapes of slot structures can realize the adjustment and control of transmission spectrum of MDM wave guide. Meanwhile, the broadband filter function can be achieved by the combination of multiple slots of different sizes. At the same time, the change of ZIM inside structure parameter can better adapt the transmission of ZIM wave guide. It proves that new electromagnetic metamaterial, combining its application in sensor, is a newly designed effective way to improve the sensitivity of sensor. Compared with similar micro sensor, the electromagnetic metamaterial sensor has higher sensitivity which makes measurement much easier. This is of great value to the enhancement of sensor capability, thus it can be better applied in more fields. By the research on new artificial composite material, its use will be further promoted and it will benefit in more fields.