Research Of Polymer Planar Optical Waveguide Delay Line Array

Mid-20th century, phased array antenna has been widely applied to the militarydomain. However, because of the bandwidth of the traditional phased array antennacan not meet the needs of people, optical phased array antenna has become a hot topic.Optical true-time-delay technology is used in optical phased array antenna, the core ofdevice is optical delay line. Optical delay line is divided into optical waveguide delaylines and fiber optical delay line, optical waveguide delay line is better than fiberoptical delay line, because fiber optical delay line is difficult to precisely regulate andcontrol the delay time. Using polymer to fabricate polymer device has a simplepreparation process, low cost and high performance, it is important significance forresearching polymer planar optical waveguide delay line array.In this paper, we have researched polymer optical delay line array. And we finishdesigning and simulating delay line array and MMI thermo-optic switch. We fabricatedelay line device with semiconductor planar process. At last, we test the performanceof the device. We design the delay line device, which integrated thermo-optic switch.We design the delay line device with switch-selective function. The main work of thispaper:1. We use Rsoft software to simulate waveguide based on the refractive index andthickness of each layer for light field. We design the structure of MMI opticalswitch and simulate the optical field distribution of MMI optical switch which isheat or not. Taking the loss of delay line device and the size of the device intoaccount, we design a4-channel delay line array device with spiral structure.Finally, we use L-edit software to integrate MMI thermo-optic switch with delayline, and design a polymer waveguide delay line array layout with a kind offunction of switch selection. 2. According to semiconductor process such as spin coating, lithography, exposure,aluminum evaporation, a planar optical waveguide delay line array has beenfabricated. We use the test system for testing the function of the device. Finally,we obtain the infrared output spot and the loss of the device. What’s more, we testthe device for selecting of stitch, whose the raise time and fall time are398sand378srespectively.