Study On Stability Of The Nozzle-floating Plate Mechanism Of An Air Lubricated Six-axis Force Sensor

Due to the compressibility of gases, it is easily lead to air float six-dimensional forcesensor work instability. Nozzle-floating plate mechanism is the basic unit of air floatsix-dimensional force sensor, stability of nozzle-floating plate mechanism is the key tothe research of stability of air float six-dimensional force sensor. In this paper, carry outa systematic theoretical study about the stability of nozzle-floating plate mechanism, themain contents and results include the following aspects:1.Analyze the working principle of air float six-dimensional force sensor, establish thefunction formula reflect the relationship between measured external load force and filmpressure;2.The main causes of instability about nozzle-floating plate mechanism-hammerinstability phenomena and air float micro-vibration phenomena has been systematicallystudied, analyze both mechanism, establish a determining theoretical basis for hammerstability of nozzle-floating plate mechanism; From the perspective of numerical,analyze the nozzle radius, the radius of the pressure chamber, the pressure chamberdepth, orifice radius, gas pressure and action mechanism of external load force forhammer phenomenon;3. Based on the hammer stability of nozzle-floating plate, while ensuring that meetthe measurement range, the orifice is not blocked, easy processing and other conditions,establish a mathematical model of nozzle-floating plate stability, optimize design of thenozzle, calculate the optimal solution and optimal value with the model by Matlab, gotthe nozzle size and air pressure of Steady work;4. According to the data obtained by the optimization, design and processing nozzle,develop experimental device, Set up experimental platform for comparison test of thenozzle before optimization and after optimization.Experimental results show that, the measurement data error, standard deviation of theoptimized nozzle are smaller than them with the pre-optimized nozzles, and hammerinstability phenomenon does not appear, Verify the correctness of this paper, aboutstability analysis of nozzle-floating plate mechanism and nozzle optimization model.Basically solved instability problems the nozzle-floating plate institutions.