Research On Fiber Fabry-perot Pressure Sensors

Optical fiber sensors have many special advantages, such as simple structure, smallsize, free from electromagnetic interference, which are widely applied to industrial andmilitary fields including aerospace, energy, architecture, etc.Fiber Fabry-Perot sensors are the typical representative in fiber optic sensors. FiberFabry-Perot sensors are widely applied for their high sensitivity and good reliability.Fiber Fabry-Perot pressure sensors have attracted great interests in a large number ofapplications such as automotive and aerospace industries, and down–hole monitoring inoil wells. They can offer outstanding advantages over electrical transducers, such aslong-term stability, EMI immunity, potential to operate in harsh environments, smallsize, etc.Based on the need of nation, and by a vast amount of reading, a new effectivemethod of making fiber pressure sensors to measure pressure under high-temperatureenvironment is presented in this thesis.The principle and design of pressure sensors are presented in this thesis. Accordingto the diaphragm pressure principle, two kinds of fiber Fabry-Perot pressure sensorsfabricated by157nm laser are demonstrated. The two kinds of fiber Fabry-Perotpressure sensors have been tested in the respective range, showing the linearity of0.99,the maximum error less than1%. The5MPa fiber pressure sensors are tested under thehigh-temperature environment, showing a linearity of0.998. After the standardmeasurement test, the5MPa fiber Fabry-Perot pressure sensors have been awarded thestate1calibration certificate.