Vibration Technology Research ARM-based Laser Interferometer

Optical interferometry is a non-contact measurement, it has high sensitivity and high precision. It is widely used to measure displacement, length, angle and shape. Interference fringes reflect the measured information, the underlying measurement principle is that the light is divided into two roads, the interference fringes is the trajectory that is formed by the similarities of optical path difference. In interferometry, the external vibration and air turbulence will cause the change of optical path difference, then the interferogram jitter, it reduces the accuracy of interferometry, limits the application range of the interference technology. Therefore, it is very important to design a perfect anti-vibration system.Firstly, this paper analyses the influence of vibration sources, introduces the current research situation of anti-vibration interference technology. Then studies the relevant principle of anti-vibration interference technology, according to the demand of the system, put forward a new vibration compensation method which based on ARM. Anti-vibration system designs in this paper contains the vibration detection module, control module, vibration compensation module and the phase shifting interferometry system. Vibration detection module implements light intensity signal detection. Processing control module is responsible for analyzing the light intensity signal, and outputs a control signal. Vibration compensation module change the output wavelength of the tunable laser by precision voltage source, compensate the vibration signal, remain the interference fringe stable.The paper analyzes and designs the functional modules of system, gives the specific design circuit, compiles the related program. Finally, tests the system function, it can achieve good results. The system running fast, small volume, meet the actual demand.