| Diamond-Like Carbon thin film is a kind of amorphous carbon films containing sp3and sp2bonding. It is currently a hot research topic in the field of functional thin film materials, possessing excellent properties such as high hardness, low friction coefficient, wear resistance and good biocompatibility, etc. It has been widely used in mechanical processing, protection, electrical, acoustic, optical and medical and other fields. However, It often works in the friction and corrosion environment. therefore, in addition to the requirements of its excellent mechanical properties and photoelectric features, good environmental tribology properties and corrosion resistance of various kinds of corrosive environment are needed at the same time.In this paper, DLC and Ti-DLC thin films were deposited on304austenitic stainless steel substrate surface by the unbalanced magnetron sputtering technology. Studied the basic mechanical properties, tribological properties, electrochemical corrosion environment of DLC films and mechanical properties of Ti-DLC films, the main results were as follows:(1)The characterization of the morphology, structure, composition and basic mechanical properties of DLC filmsThe surface and section morphology, phase structure, composition and nano hardness of DLC films were studied by FE-SEM、TEN、Raman spectrometer、XRD and Nano pressure/scratches instrument. Results showed that the surface of DLC films was uniform distribution, the section of DLC films was smooth. there was an obvious peak and convex shoulder in1393cm-1and1577cm-1,showed a typical Raman spectral features of diamond-like films. The The nano indentation apparatus test results showed that the hardness of the DLC film was11.660GPa, elasticity modulus of DLC film was139.154GPa.(2) The environment tribology properties of the DLC filmsThe tribology properties of the DLC films under different condition (dry-state, water lubrication, oil lubrication)were tested by the ball-disc friction and wear tester of the Swiss company CSM. Results showed that the friction coefficient of DLC films were0.07and0.1under the dry friction and water lubrication conditions, while the stainless steel was0.37and0.23, respectively. Both dry-state and water lubrication condition, the DLC films were significantly improved the wear resistance and lubricity of stainless steel. But the friction coefficient of DLC thin film under the water lubrication was higher than under the dry-state. this was mainly due to H2O and O2participated in reaction during the friction process, reduced the mechanical properties and chemical inertness of DLC film, increased the adhesion effect. Under the condition of oil lubrication, the friction coefficient of DLC thin film and stainless steel were0.043and0.040, respectively.(3) The electrochemical corrosion properties of DLC thin filmsThe electrochemical corrosion properties of DLC thin films under different electrolyte solution (3.5%NaCl、10%HCl、20%NaOH)was tested by electrochemical workstation. The results showed that the corrosion potential of DLC thin film was higher than that of stainless steel under the3.5%NaCl and10%HCl solution. while the corrosion current density of DLC film was lower than stainless steel. But in the solution of20%NaOH, the corrosion resistance of DLC film was a the same as that of the stainless steel.(4) The mechanical properties of Ti-DLC filmsDLC films with different content of Ti were deposited by changing the sputtering current using Shen Keyi LD600type magnetron sputtering coating machine, solid graphite target and acetylene, purity metal Ti were as C source and Ti doping source respectively. The results showed that the Nano hardness of the DLC films presented the trend of increase first, then decrease with the increase of sputtering current. The membrane/adhesion strength and fracture toughness of the DLC films could be improved by doping amount of Ti. The friction coefficient of the DLC films presented a trend of reducing first and then rising with the increase of sputtering current. |
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