Design And Realization About The Software Of TOF-SIMS

TOF-SIMS combine the time of flight quality analysis technology and thesecondary ion mass spectrometry technology, its extremely fast analysis speed andpulsed ion beam makes few consumption of samples, and TOF-SIMS has a very widescope of the analysis of quality. TOF-SIMS is widely applied in various fields.This paper is based on national major scientific instruments and equipmentdevelop special project. The software of TOF-SIMS is a key task of the project, andthe instrument of the structure is complex, including vacuum system and ion source,an ion optical system, and the3-d sample stage system, ion detection part. There areso many units to control. So a complete instrument control software is necessary.Now, in domestic the study of TOF-SIMS is less, and the study of controlsoftware of TOF-SIMS is almost no reports. In foreign companies such as ION-TOF,TOF-SIMS instrument has high performance, the control software is relatively mature,but the instrument automation software development and instrument remote controlsoftware are not very mature. In this paper, based on the complete TOF-SIMS basicfunction module development, the remote control of the instrument and errorauto-correction method are studied.First of all, do the overall design of the software, determine the research contentof the paper, task partitioning, the content of the research is divided into three tasks:the development of the basic functions of the software, the realization of the functionof remote control, research of image registration algorithm for error auto-correctionof sample stage.Then, develop the four basic functions of TOF-SIMS instrument software:intelligent vacuum control software, ion flow control software, ion current detectionsoftware and3-d samples stage control software. Using the producer/consumer designpattern to develop the software. The producer/consumer design pattern is not onlymake the operation more efficient, and make the software has better interactivity.Then, based on the completion of the four basic functions of local software,develop the remote control software of the instruments. This paper compares theexisting two remote control mode: the server computer screen capture program, client and server via the command sent and parsing. Considering the factors the influence ofthe network, this paper chose the latter, the latter on the network performancerequirements are lower. And on the basis of the original scheme, using the NI Servertechnology, greatly simplifies the development difficulty. This paper has complete theremote client software of the3-d sample machine control and the server software.Test the software in the lan connection and the network connection, thecommunication speed was not significantly different, and the software can runsmoothly.Finally, the method of error auto-correction are studied, this method is helpful torealize the automation of3-d sample stage. The key technology of this method is therealization of image registration. The paper improves the SIFT algorithm, with LBPfeature description algorithm and the principal component analysis method. Finallythe new algorithm is compared with the original SIFT algorithm. The new algorithmhas a higher speed, and registration results meet the requirements of the errorauto-correction system.