Plasma Etching Periphery Process And Metallurgical Silicon Solar Cells’ Leakage

This paper introduced the industrialization process of the production of polycrystalline silicon solar cells, focuses on plasma etching periphery process and comparative experiment about metallurgical silicon solar cells. Etching process is important part of manufacture of crystalline silicon solar cells. It is directly related to the overall performance of solar cells,especially the leakage of solar cells. So master etching process is very important and necessary for the manufacture of solar cells.Compared to solar cells from chemical purified silicon, leakage situation of metallurgical silicon solar cells is not good. In order to improve conversion efficiency and reduce leakage for metallurgical silicon solar cells, the experiment contrast performance of metallurgical silicon solar cells between washing PSG and non-washing PSG before phosphorus gettering of hybrid. Experimental results achieve the expected objective:average transfer efficiency of metallurgical silicon solar cells with washing PSG before phosphorus gettering of hybrid is17.14%, average transfer efficiency of metallurgical silicon solar cells with non-washing PSG before phosphorus gettering of hybrid is16.81%; average of Irev1, Irev2of metallurgical silicon solar cells with washing PSG before phosphorus gettering of hybrid are0.682A,1.317A; average of Irev1, Irev2of metallurgical silicon solar cells with non-washing PSG before phosphorus gettering of hybrid are0.835A,1.350A. Overall performance of metallurgical silicon solar cells with washing PSG before phosphorus gettering of hybrid is better than metallurgical silicon solar cells with non-washing PSG before phosphorus gettering of hybrid, also leakage of metallurgical silicon solar cells with washing PSG before phosphorus gettering of hybrid is reduced. The experiment provides a reference for optimization of metallurgical silicon solar cells’ production process and reducing leakage of metallurgical silicon solar cells.