A Construction Of The Six-DOF Calibration System Of Nanopositioning Stage Based On Laser Interferometer

With the development of micro/nano science and technology, nano-positioningtechnology has become a key technology of science in nano science and technologyfields, nano-positioning for multi-degree of freedom measurement and calibration aredemanded. This thesis is supported by the National Science and Technology SupportProgram (NO.2011BAK15B09). In order to establish a nano-positioning measurementsystem with six degrees of freedom, the calibration system with laser interferometer isstudied in detail.Based on the principle of a laser heterodyne interferometer, a nano-positioningmeasurement system with six degrees of freedom has been designed with the3-axishigh stability plane mirror interferometer produced from ZYGO company. The opticallayout and mechanical structure of the system is described in detail. The base is amatble structure and the Z-axis optical is designed with the marble gantry structure;the nano-stage can be adjusted in three dimensional angles. The maximin shapedchange of the system is0.368μm by the simulation of ANSYS software. The testingcapability of the system has been analysed, the maximum positioning measurementrange is10mm×10mm×10mm and the resolution is0.15nm, the maximum anglemeasurement range is4mrad×4mrad×4mrad and the resolution is0.0044arcsec. Thesoftware program has been designed in detail to get the six-axis data from themeasurement board with VME bus and to show the position or to save the data. It candeal with the six-axis data simultaneously.The thesis performed the following experiments:(1) the laser interferometer ofnanometer displacement calibration system was constructed with the uncertainty of2.93nm, the stability is3nm and the resolution is better than1nm. Some experimentswith the NPXY100Z10of the Npoint company shows that the linearity is0.1%of thefull scale and the resolution is better than one nanometer.(2) The multi-DOFcalibration system was constructed. The X-axis and Y-axis of the nano-stage moved10μm travel with1μm step and then return to the original position, respectively. Theexperimental results show that the X-axis linearity is0.14%of the full scale and thenonlinear error is3.15nm, the coupling error is4.0047nm, the pitch angle is -0.4502mrad, the yaw angle is0.9803mrad and the roll angle is-0.7843mrad; theY-axis linearity is0.14%and the nonlinearity error is-0.503nm, the coupling error is44.999nm, the pitch angle is0.2956mrad, the yaw angle is-0.6067mrad and the rollangle is-0.1370mrad.The nano-positioning calibration system with six degrees of freedom is easy toinstall and simple to operate. The experiments indicate that the system is practicalwith high accuracy and can be used to measure the ordinary nano-stage with themovement of the multiple degrees of freedom.