Development And Error Compensation Of Surface Measuring Platform For Large-size Optical Components

With the optical components especially aspheric are widely used, high-precision optical components have been branched out into smaller and larger direction, At the same time, the requirement for the accuracy of optical components is becoming higher, so the machining and measuring technology have become an important topic in the optical system. A lot of manpower and material resources had been invested in the machining and measuring technology of optical components, in China, the measuring technology is mainly for small-size components at present, but is weak link of large-size components.This work is based on large-size optical component measuring platform, analyze and measure the institutions error. Meanwhile, the error model and compensation technology are system studied. The main work can be described as follows:1. According to the characteristics and requirements of large-size optics measurement, the detection system was improved, including the mechanical structure, mechanism, the mearsuring unit, control and measurement system On the basis of the original mechanical structure, optimize the unreasonable institutions. Meanwhile,the control and measurement software of large-size optical element is developed. After mearsurement initialization, a reasonable measurement path is planned, which suitable for different types of optical element2. Analyzing the institutions error, the single part institutions error is measured at the same time. According to the mathematical model of measuring platform, Error parameter model based on ballbar was established. Based on the model, the coefficient of single error is identified, and error compensation scheme is put forward. In view of the overall error, error compensation experiment was carried out, to verify the feasibility and accuracy of error modeling method.3. the measuring platform was applied to measure various types of optical components, with the designed data processing and error compensation, the experiment results show that the surface accuracy is within plus or minus three microns, which reached the designed requirements. Achievements of the work will enhance the large-size optical components measuring efficiency, and provide a favorable support for large-size optical components wide application.