Reserch On The Detection Technology Of Aspheric Mirror Based On Sub-Aperture Stitching

Nowadays, more and more aspheric optical elements are used in various fields of optical systems because they have excellent performance in the optical system. With the widely application of the aspheric optical element, it has highter requirement of the processing and detection. In order to produce high-precision aspheric optical element, there must be a corresponding detection method. Sub-aperture stitching is a virtual method for testing aspheric optical element with high-precision and low cost.In this paper, the technology of the annular sub-aperture stitching is done in-depth research. Firstly, the base of sub-aperture stitching and the relevant theory of aspheric optical elements have been investigated. Then, the principle of sub-aperture stitching is introduced, this part highlights the algorithm of stitching and the key technology of Zernike polynomial fitting. Next, with the model of a quadratic paraboloid, we derived the partition of annular sub-aperture. Finally, we used different stitching algorithm, through simulation, the feasibility of sub-aperture stitching is verified. Besides, in the final chapter, the relevant error factors that affect the precision have been given and some solutions have been raised.