Signal Processing And Research Of Measurement Technology Of Homodyne Laser Interferometer

Due to Laser’s high directivity, high monochromaticity and coherence characteristics, so that it not be replaced with ordinary light source. Interferometer using laser as a light source, makes the measurement more accurate, wider range. With more and more demands of the mechanical technology on improvement in precision, which makes the measurement accuracy of the increasingly high demand, the requirement of current can reach micron or more accurate degree, so the research on high precision measurement technique of single frequency laser interferometer system gradually is paying attention.This paper introduces the current situation of the development of laser interferometry instrument and research status of single frequency laser interferometer. From the interference of light equation and wave equation, this paper does research on the interference principle of light, and how to get related light. Respectively from the wave front method and amplitude method discussed, then this paper does research on the measuring principle of laser interferometer. How Michelson equal inclination interference is produced is analyzed, energy distribution of equal inclination interference of any group on focal plane is deduced, equal inclination interference on focal plane energy changes with the position of measuring mirror is studied.This paper does research on the technology of high accuracy measurement of single frequency laser interferometer. It developed an adjustable laser optical path length measuring instrument, and proposes the use of the laser on the change in length gauge method under different positions of the measurement of length measuring instrument. It studies the structure of the system measuring instrument, and develops its accessories, and describes the technical innovation, based on the measurement data, analyzes the uncertainty of experiments and data.