| As the last link of the laser device of the Inertial Confinement Fusion, FinalOptical Assembly is one unit consisted of light, machine and electricity, which hadgreat influence on the passed beam quality and shooting accuracy of the whole laserdevice. With the increasing of the energy of the device used in the following reserach,the clean environment problem involved in the assembly gradually ran out while theaerosols, which generated in the internal assembly after strong laser irradiation,seriously affected the passed beam quality and intensity and restricted the continuity,stability and security of target practice. therefore it’s necessary and key to explore themechanism of the generation of aerosols so as to solve the clean environmental problemthoroughly and it’s an important way to conduct the research focusing on the currentcleaning process implemented on the cleaning of Final Optical Assembly.At first, the paper illustrated the related principles of the current cleaning processand molecular dynamics, based on which, we determined integral algorithmã€ensembleand temperature control strategy used in the following simulation.Secondly, the paper conducted the contrast experiment research on the water filmrupture method, which was widely used in the detection of surface cleanliness, mainlyfocusing on indoor clean environment level, drying technology and drying temperature,pickling process, which might have influence on water film forming ability of thesurface.Third, the paper conducted the the molecular dynamic simulation of water adsor-btion on the substrate—aluminum to get the contact Angle of water on aluminumfrom the point of view of the simulation and it’s changing features under differentsituation.Finally, using the X-ray photoelectron spectroscopy analysis, we analyzed thepollution degree of the work-piece before and after cleaning and found that thepenetrating depth of the organic pollutant was about14nm, besides, the currentcleaning process was useful enough to remove the organic pollutants on the work-piece. |