Nanoimprint System For Micro-optical Elements On Curved Basement

Micro-optical elements have been widely concerned.Compared to thetheoretical research, manufacturing methods are the bottlenecks that limit itsapplication.Nanoimprint technology, with its low cost and high machiningaccuracy,is wiedly known as it can easily breaks the resolution limit of traditionalprocessing methods. In the past decade, three kinds of nanoimprint technology,include thermal imprint,ultraviolet-imprint and micro-contact imprint have beendeveloped.Among those ultraviolet-imprint is most highly regarded one,usingultraviolet light to irradiate the UV-photoresist which pressed by the transparenttemplate,the ultraviolet-imprint method has characteristics of high workingefficiency,low cost and high resolution.In the paper, the development of Nanoimprint technology and equipment areanalyzed firstly, the problems in the designed previous nanoimprint system areexplored, a new approach called flexible pressure heads is now proposed. Using thesoft film of PWM which has the Micro-structure pattern to imprint instead of usingtraditional hard material can replicate more patterns evenly. Finally a device that hasthe Soft-ultraviolet imprint function and hot imprint function has been devised.The following work has been accomplished:(1) A new proposal that usingPDMS soft template to imprint instead of traditional contacting imprint has beenraised;(2) Designed,processed and fitted the nanoimprint system;(3) Designed thetemperature control system based on MSP430, including selection for thetemperature sensor,Signal conditioning and conversion, processing and computing,the design for PWM control;(4) Finished the feasibility analysis about the pressurecontrol which based on high-speed switching valve,the locking cylinder and softpressure head;(5) The control software was written using labview, which cancontrol the imprint process and display the data of pressure and temperaturereal-time;(6) Experiments has been executed, including the temperature controlexperiment, the temperature control experiments, the test for the uniformity ofpressure output and pressure control precision. Thermal imprint experiment usingbulk metallic glass and soft UV imprint using UV-photoresist also have been done,these two experiments both achieve a perfect transfer of the micro-structure pattern,satisfy the performance criteria and meet the needs of scientific research.