The Design And Study Of Servo Amplifier Of Halogen

A servo amplifier of halogen is a part of power amplifying equipment used to rapid thermal processing. It features closed loop, which can smoothen the current and the voltage for the system, meanwhile monitor the input power simultaneously. This article does not analysis specific heating structure, whereas, after synthesized and simulated multiple heating structures’features, proposes a specific research about rapid thermal processing. Usually, as the critical part of rapid thermal processing, due to unstable input current, voltage and uncontrollable open loop, halogen servo amplifier impedes the wide application. Obsolete halogen servo amplifier was designed using MOSFET, SCR or GTR as its amplifier module. As per excessive driving current or voltage dip, or low carrier density, unstable current occurs resulting anticipated control error, further reduces control accuracy. In order to overcome this issue, researchers starts using IGBT as an essential part of power driving component. Via current sensor and voltage sensor, the M57962L control chip drives IGBT module to utilize the closed loop controlled current and voltage.This essay elaborates the fundamental design theory of halogen servo amplifier, and includes comparison and analysis of each amplifying systems, briefly analyses the mechanical structure, angular coefficient calculation and thermal stability. Based on the previous result, it proposes a design applicable to the related amplifiers. The essay will emphasis on the options of servo amplifier components, circuit design and the synthetic analysis of separate circuits and the entire circuit. As to the controlling method of heating system, this essay states an energy iterative control method to systematically improve the accuracy and the stability of rapid thermal process, although it is on the theoretical stage. In the end, it will experiment on the heating driving system, utilizing this driving circuit and FPGA circuit.Through the analysis of driving control circuit of rapid heating processing instruments, it concluded that halogen servo amplifier on rapid thermo processing can achieve the purpose of rapid heating, high accuracy control and system stability under the no overshoot condition.