Instructure And Performance Of Tiain Film By Unblance Magnetron Sputtering

Along with the rapid development of modern industry, there is higher and higher requirement of the material quality (hardness, wear resistance, corrosion resistance and so on). So coating with a fine performance film on these materials is one of research focus in this field. TiN film is one of the hard films which were studied early and have been widely applied. Compared with TiN film, TiA1N film has higher strength, hardness, abrasion resistance, corrosion resistance and high temperature oxidation resistance. So TiAlN film is widely used as machining cutter and some other wear-resisting parts.In this paper, using closed field unbalanced magnetron sputter ion plating to prepare TiA1N film on T10steel. Test the film’s composition, organization structure and surface morphology by EDS, XRD and SEM. Surface microhardness, bonding strength and friction coefficient were also tested. Experiments were done to study the high temperature oxidation and corrosion resistance. The main work and achievements are as following:1. The TiA1N films in different substrates are very smooth and dense. There are differences in the size of crystals in the internal microstructure from several decade nanometers to hundreds nanometers. The composition of TiAlN film is Titanium, Aluminum and Nitrogen, which contained A1N, Ti3A1N and Ti2A1N crystal phase.2. The microhardness result show that TiA1N film has higher hardness than matrix. Hardness of thin films is different with different substrates. The value of2575HV0.025could be measured as the maximum microhardness. The result from indentation method, scratch and friction test show that the TiA1N film on the harder substrate has lower friction coefficient and higher bonding strength.3. High temperature oxidation of TiA1N film at600℃,700℃,800℃and100℃show that the film oxidized severely around800℃.At900℃, it has been completely ineffective.4. Results from electrochemical corrosion tests and immersion corrosion test show that TiAlN film has good corrosion resistance in salt and acid.