Research On Processing Technology Of Insitu Manufacturing Miniature Mould And Surface Polishing By Micro-EDM

With the rapid development of MEMS technology, as a miniature componentsof a kind of very important, micro-parts are widely used in biological and medicaltreatment, aerospace, printing and dyeing, textile and micro-electronics fields. Thepunching technologies use plastic deformation forming microporous parts, has theforming of good quality, high efficiency and low cost of processing the advantages.However, along with the pore diameter more and more small, miniature mouldlocation accuracy and to guarantee the coaxial tolerance and the cutting clearanceuniformity of micro punching process has been difficult to lead to meet precisionand quality requirements. In this paper, based on the electric spark a subtleminiature mould manufacturing and micro punching combination in situ processingsystem, can use the micro-EDM in situ processing miniature mould and micropunching processing, solved the punching process miniature mold the coaxialtolerance and the cutting clearance uniformity of the key technology to realize themicroporous parts of high quality, high precision manufacturing.Based on the subtle electrical discharge machining process, put forward anddetermined the electric spark of main shaft system structure scheme, according tothe punching process, designed with precision guide, elastic pressure side of themould structure, key components of the theoretical calculation and intensity, AnsysWorkbench finite element simulation, use the overall Solidworks20103d design,and determine the in situ manufacturing process flow.According to the subtle electrical discharge machining principle, through themicro-EDM micro punch and concave die hole processing tests, and the dischargeparameters on the processing speed and the influence law of electrode loss. Theresults show that all discharge parameters on the effect of fine EDM iscomprehensive, not focusing on a technology index, this article throughcoordination consider all the technical index, determined the best processparameters, using tiny electric spark in situ processing the size of high precision,good the coaxial tolerance of miniature mold.Due to electrical discharge machining surface of workpiece exist change layer,the performance of the micro punch to have an adverse effect. By electrochemicalpolishing technology plasma composite-of hard alloy material to the surface of themicro punch changes layer removal and polishing, the different parameters on theelectrochemical polishing and plasma polishing the influence law of effect,determine the optimum technology parameters, success the fine punch the surfaceroughness of the Ra value by0.62u m reduced to90nm, Rz value by5.15u m reduced to0.92u m.Use the high quality of the stainless steel SUS304miniature mould foil micropunching process test, success get100μ m micro hole pieces, and micro hole qualityevaluation and punch failure analysis, the result from the microporous highprecision and surface quality is good.