Micro Electrochemical Machining (micro-ECM) is a kind of non-contact processingtechnology, in which the metal artifacts as anode is produced based on anodic dissolutionin electrolyte. The technology has been widely used in military, aerospace, scientificresearch, medical, life and other fields at present because there are no deformation andstress of the cutting, no heat affected zones, no tool wear, and low cost.A new micro-ECM machining method is proposed in this paper which uses theelectrode axis vibration machining parts. The three-dimensional model of the machinecore components is build. The dynamical model and differential equation of the beam tosupport the electrode axis is set up, and its natural frequencies and modal functions aresolved out, and that the effects of the parameters on natural frequencies are analyzed. Theanalysis results show: the natural frequency decreases with the increase of the length ofthe beam, and linearity increases with the increase of the thickness of the beam.The free vibration of the machine core components is simulated by ABAQUSsoftware and compared with the theoretical values, which demonstrates the correctness ofthe theoretical analysis.According to the principle of capacitor charge and discharge, the voltage responseequation of the piezoelectric patches is deduced. Take advantage of the modalsuperposition principle, the forced response equation of the beam with harmonic electricalsignal is worked out, and the forced responses of the beam and the resonance response areinvestigated. Under different frequency excitation voltages, the changes of thedisplacement response, the velocity response and the acceleration response of the beam’smidpoint are discussed. The effects of the excitation voltage and piezoelectric parameterson forced responses are analyzed.According to the micro-ECM equivalent circuit model, the effects of the vibration ofmicro-tool electrode and processing parameters on the potential difference are analyzed.At the same time, the feasible region of the potential difference is worked out. Based onthe principle of electrochemical forming, Finite element simulation of micro-ECM is processed.The structure design of micro-ECM machining tool is finished, and the modelmachine is manufactured. The electrode axis vibration machining is compared with thehydrostatic processing. Results show that the method can improve the quality of processedproducts obviously. |