Research Of Terahertz Function Devic Based On Subwavelength Metallic Array

Terahertz technology is not only the foundation of basic scientific problems, butalso the great demand of countries. There are potential applications at short distancewireless communication, biological sensing, medical diagnosis, material properties,spectrum detection and nondestructive detection, etc. Its unique advantage has beenwidely recognized. To enhance the further development of THz technology application,we need not only a very good and stablely reliable THz sources, high sensitive and highsignal-to-noise ratio of the THz detector, but also a very good THz function device.However, most of the natural material and existing electronics and optics can not realizeterahertz transmission very well，which restricted the develop of terahertz technology inthe direction of practical application, is becoming one of the key issue in terahertz field.This paper aimed at the application of terahertz sensor and detection technology, tostudy at the subwavelength metal hole array and electromagnetic metamaterials in thefield of terahertz detection and absorption application, and develop practical newfunction of terahertz devices.In this thesis, there are two mainly aspects:The terahertz wave detector: In this work, several metal hole array structures ofdifferent size and shape on the THz wave were designed. The structures were combinedwith the ultra-thin and low refractive index polymide films, and the detection sensitivityof the structures was explored on a THz time domain system. MHAs with differentstructure were fabricated with femtosecond micromachining technology, and the THzreflection spectrum was measured by a THz time domain system (TDS). By attached anultra-thin PI (10μm) film to the MHA, an obvious blue-shift of reflective resonance wasobserved, which indicated a high sensitivity of MHA to low refractive index materials.This characteristic allows us to achieve MHA based high-sensitive sensor at THz band.“I” terahertz metamaterial absorbers with a broad and flat high absorption band:In this work, we use CST Microwave Stmdio to design a variety of different structures,select the best one end. By optimizing the parameters, we make the two peaksuperposition. We manufacte the “I” terahertz metamaterial absorbers with a broad and flat high absorption band on micro machining platform, and test it on the TDS terahertzspectrum test system. Terahertz wave incide to the absorber with0°,45°,90°,135°,180°. When at a specific angle90°, the absorption effect is much better. It has abroadband absorption peak at1.25THz-1.55THz. At the same time the Absorption peakis reached100GHz broadband. We think it is a successful model.