Study Of Large-area High-precision PCB Lithography

In recent years,along with the appearance of the high-end electronic products,such as intelligent mobile phone,flat panel computer and so on.The linewidth requirements for printed circuit board are more and more narrow. Now, the linewidth of part of PCB products is less than10μm and the linewidth of PCB which is about10μm will become more and more popular in the next10years. The market prospects of this kind of high density PCB are good.The traditional mercury lamp lighting+contact or proximity exposure method can not meet the requirements of this kind of high density PCB.In order to cope with the requirements of high-end electronic products for large area and high density PCB,a big improvement of PCB production equipment is needed at present. From the economic consideration,researching some cheap PCB products is needed to meet industry demand.This paper focuses on the research of large area high precision lithography machine which is about10μm linewidth, the main contents include projection lens and precision motion platform.The third chapter introduces the design of DMD projection lens and the resolution of it is4μm. The single exposure area of the projection lens is(Ⅰ)=5mm,which can be used for the mask production and small scale proofing of about10u m width PCB,and it can also be used for the production of TFT-LCD. The fourth chapter introduces the design of geometric projection lithograph lens with a resolution of8μm. The single exposure area of it is...