The Research Of The Novel MEMS High Shock Piezoresistive Accelerometer

MEMS/MST is a novel technology developed in70s, last century; especiallymake a great step in90s. It’s obviously profitable for the miniaturization of thesystem, with more cheaper, subminiature, good consistency parts fabricated byMEMS, just the same as the IC chips. The novel accelerometer fabricated byMEMS is widely used in the arm, mobile, spaceflight and aerocraft, explorationand disaster forecast. And MEMS high-shock piezoresistive accelerometer is themost important branch of the MEMS accelerometer, with the advantage of rapidresponse, high sensitivity, high precision and micro volumes.A eight-beam structure of MEMS high-shock piezoresistive accelerometer waspresented and achieved in this paper, which is WLP chip and sensitive in Z axis,and a whole method from design, emulation, process, packaging to shockmeasurement. It has the characteristic of high frequency, wide range and lowcross-sensitivity. The main research issues in this paper is: the firstchapter—introduction, the development of MEMS is discussed, and the researchbackground of the paper; the second chapter, the design and emulation of theMEMS high-shock piezoresistive accelerometer is discussed; the fabricated processof the the MEMS high-shock piezoresistive accelerometer is discussed in chapter3;the main content of the chapter4is the design of the accelerometer circuit; chapter5is the packaging of the the MEMS high-shock piezoresistive accelerometer; andin chapter6, the shock measurement method and the test result is presented at last.