The Technology Of Preparation Of MEMS Micro-needle And Research Of Its Process

Micro needles have become an attractive topic of MEMS research.Micro needles can be classified into two type, they are in-plane andout-of-plane microneedle repectively. The in-plane type generally has onlyone row of needles, and the out-of-plane needles can contain arrays ofmicroneedle. The out-of-plane needles allow for drug distribution over alarge area of skin. Out-of-plane micro-needle has a special three-dimensionalmicro-structure, so the traditional planar microfabrication technology cannot meet its requirements. In this paper, we introduced the actual researchsituation in microneedle and analyzed the existing key problems. Then wetake the back side exposure and inclined and rotating lithography as ourresearch emphasis. The two kinds of exposure are based on UV-LIGAtechnology. Based on the simulation and experimental research, we hope todevelop a simple manufacture technology. In this paper, we improved theexisting equipment of our laboratory and verified that both back sideexposure and inclined and rotating lithography also suit to be used in themanufacture of three dimention micostructure. We successfully producedconical out-of-plane micro-needles of PDMS through pattern transferbetween polymer materials and the SU8photoresist mold. And based on the process, we researched the production of conical out-of-plane solidmicro-needles of Ni and hollow out-of-plane micro-needles of epoxy.