Process Optimization Research Body Acoustic Wave Device

Bulk acoustic wave technology has been developed with development of bulkacoustic wave transducer since late in the l960’s. With featuring light weight, small sizeand temperature stability, bulk acoustic wave delay line is applied to the signal processof microwave system, and particularly, as it shows outstanding performance inmicrowave signal delay process and irreplaceable feature, it is widely employed inmilitary electric equipment.The26thinstitute of China electric technology corporation is an unique unit whichdevelops and manufactures bulk acoustic wave component, and implements engineerpractice and small production of bulk acoustic wave delay line. However, as the currenttechnology is based on the technology and equipment of the70’s in the20thcentury, theproblem of technical inconsistency, low rate of finished products and low reliabilitylevel come out. The improvement of design and technics of bulk acoustic wave has beenimperative under the situation.The topic of research emphasizes the problem of low rate of finished products andlow reliability level which affect engineer practice of bulk acoustic wave, improvesdesign and technics. Firstly, the design of bulk acoustic wave transducer is improved,and all parameters are optimized, as well as a new transducer topology is designed.Secondly, a new way of technics is found. based on current technical platform, the studyof technics optimization is carried on by employing SAW technical platform andnon-silicone base quartz MEMS technical platform. With solving the problems ofelectrode aligning of dual terminal transducer, electrode production, ZnO production,electric signal output and fully hermetic package of upper and down electrode whichaffect rate of finished products and reliability, the bottle neck of mass production ofbulk acoustic wave component is broken, and the technical inconsistency is improved.Finally, the delay line is obtained which meets the demands of technical indicators ofequipment and mass production. The design and technics from this topic of research has become the design andproduction instruction document of bulk acoustic wave delay line in the CETC26thinstitute.