Generation And Manipulation Of Two Dimensional Nano-Patterns Using Surface Plasmonic Interference With Different Polarized Lights

With the rapid development of the Micro-Nano science, miniaturization andintegration of devices have become more and more important for modern science andtechnology. Therefore, the micro-nano fabrication technologies have attracted more andmore attentions. However the traditional photolithography which has been a keytechnique in semiconductor industry and microfabrication is limited by the opticaldiffraction. The recent discovery of extraordinary transmission through perforated metalfilms shows that the surface plasmon polaritons on the metal surface can greatly enhancethe light transmission and redistribute the electromagnetic field in nanometer scale.These give us a new direction of photolithography beyond the diffraction limit. In thisthesis, we report a novel nanolithography technique to manipulate2D nano-patternsusing surface plasmonic interference with different polarized lights. The following resultsare obtained:(1) By designing of two-dimensional grating period to meet the surface plasmonwave vector matching conditions and controlling the polarization state of incident light,multi-mode surface plasmon super-resolution interference will be achieved. In thefour-mode surface plasmonic interference, we can obtain1D grating structure and/or2Dlattice structure when we change the polarization angle of linearly polarized light. Thatmeans different super resolved nano-structures can be achieved by changing thepolarization state of incident light only without changing the metal phase mask.Compared with the linearly polarized incident light, we can further improve theresolution of two-dimensional pattern when the incident light is circularly polarized. (2) In the six-mode surface plasmonic interference, more complex nanostructurescan be obtained by changing the polarization direction of linearly polarized incident light.It is found that when the incident light is circularly polarized, we can get a ring-typemicro-nano structure. These results suggest that more modes of surface plasmonicinterference can be achieved by changing the grating structure period and a morecomplex two-dimensional structure will be obtained by changing the polarization state ofthe incident light. These features provide a new way for generation of differentmicro-nano structures with a simple2D grating.