Design And Research Of Special Manipulator In Vacuum Environment

Robotic technology is a kind of interdiscipline integrated high and new technology,which is used to be adapted with the development of social economy. Along with the researchof the diagnosis physical experiment on vacuum high temperature plasma in our country,whether the diagnostic equipments can apply to multiple types of vacuum experimentalplatform or not has become the key technology of vacuum physical diagnosis experiment.Due to harmfulness of high temperature plasma, the independent vacuum environment ofspecial operation manipulator became assisted experimental personnel to complete diagnosisexperiment is the best means. At the same time, special operation manipulator also have broadapplication prospect in other physical experiment of high vacuum environmentWith high vacuum physical experiment environment as the platform，this paper design aspecial operation manipulator that can work in high vacuum environment. In the condition ofnot destroy high vacuum spherical laboratory which has the vacuum for3.0×10-3Pa, the maintask of the manipulator is to get the small diagnostic equipment (such as plane crystalspectrometer is bent, crystal spectrum tester) into or back it accurately and safely to facilitatediagnosis equipment cleaning and maintenance. According to the function and technicalrequirements of the manipulator,this article mainly do the manipulator with process analysisand functional analysis, on the basis of these,we concluded that the structure of themanipulator, designed and analyzed the each part of it. In order to meet the use requirementsand function requirements of diagnostic equipment, we researched the following severalaspects of the manipulator:First, in this paper, according to the use requirements of diagnostic equipment weanalyzed the whole process of manipulator, researched the function which should have, thenwe studied the main functions to get integration analysis concludes, and concluded that thestructure of the manipulator. Through the analysis of function, the point and radial controlfunction of the three degrees of freedom parallel-series mechanism is the key to the preciselocation of equipment. At the same time, we analyzed the manipulator’s visual aiming system,control system, cart components of the system, then we analyzed the driving way and drivingmechanism, and completed the structure design of manipulator.Second, introducing briefly the vacuum technology; At the same time, using the vacuumtechnology to design the vacuum system of manipulator, choosing the model of thecomponent of vacuum system; according to the design content and requirements we analyzed and calculated the parameters of vacuum system.Again, used the designing software Pro/Engineer5.0to get the3d model of manipulator;To put the vacuum chamber of as the research object, by using the finite element analysissoftware of ANSYS Workbench12.0, established the finite element model of the part ofvacuum chamber, according to the actual situation of the manipulator vacuum chamber,taking the constraint and load on the model, and then making the statics analysis and modalanalysis, we can get the maximum equivalent stress and maximum deformation value, as wellas the first10modes and corresponding vibration model of the model, the concluded analysisof data can be used as the basis for optimizing design.Finally, this paper briefly introduces workspace definition and the factors of workspaceabout the manipulator, carried on the analysis of the position to three degrees of freedomparallel-series institution, and according to the results of the position analysis, programmingand simulating by MATLAB software to get theory workspace of the manipulator.