Flat Face Aperture Stitching Interferometry Research

The technique of sub-aperture stitching expands horizontal and vertical measurement range, and can detect the large-scale optical components at low cost with high resolution and high precision.In this thesis, firstly, the technique of sub-aperture is researched, including theory, classifications and sub-aperture positioning. Secondly, the free stitching technique by which we can freely stitch adjoining sub-apertures is researched based on "error averaging method". The free stitching program is made in order to simulate the technique of free stitching, and it validates that the free stitching technique has high precision of10-11only considering the algorithm error. Then the changes of stitching precision by adding random error into every sub-aperture are surveyed. Thirdly, the experiment platform is set up by my research team and me, then the sub-aperture wave-front data are acquired, and the sub-apertures which we have gotten are freely stitched. Fourthly, the resolution and error of the free stitching technique are analyzed, whether there is gross error in the repetitive measurements experiment or not is judged, and the system of reference mirror is removed via three-surface mutual inspection technique.