| The application of MEMS (Micro-Electro-Mechanical Systems) promotes the development of intelligent and miniaturized fuse. Combining MEMS inertial switch with fuse environmental characteristics, this paper presents a kind of MEMS inertial switch which is used in the middle-large caliber fuze.The MEMS inertial switch latches detecting the response of the launch environment. On the other hand, it disconnects during the security service processing. According to the switch structure design and the environmental characteristics, the switch should be latched in the lowest acceleration amplitude pulse which peak value is3000g (g=10m/s2) and the width is3ms. However, the switch should not be closed while the acceleration pulse that peak value is15000g and the width is300μs. The switch should not be damaged under the overload pulse when30000g.The inertial switch model is composed with dynamical system and the latching system. The dynamical formula of the mass-spring system and the latching system are given by the kinetic theory analysis. A kind of Z-teeth-structure is designed in the mass-spring system. The structure parameter of tooth number, tooth depth, tooth angle and relative gap in the Z-teeth-structure is given when the system works in the fuze environment and the duty treatment based on the optimal model.Therefore, a kind of latching mechanism presents the dynamic performance that apts to latch and disconnects difficultly in the latching status. The lowest latching velocity of the latching mechanism is attained by simulation, and it’s1.918m/s. The latching mechanism’s on-resistance is0.61Ω by the experiment of electrical resistivity of Nickel.The overall mechanism is given and its dynamic performance is presented by simulation. Combined the Coventor Ware software with the UV-LIGA technology, the fabrication processing of the switch is simulated and shown in this paper. |
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