Feco Preparation Of Base Film And Its Electromagnetic Performance Of The Control Study

Recently, absorbing materials are developing to have variety of properties, such as wide frequency spectrum, lighter, thinner and intelligentized performances. However, how to improve the absorptivity of high frequency is always a key problem in the stealth technology. In order to obtain excellent absorbing properties under high frequency, the materials need to have high microwave magnetic conductance and the matching dielectric constant, as well as the appropriate anisotropy. In the recent years, the research on the thin films based on the FeCo material under high frequency has been paid a lot of attention, which due to the high saturation intensity and good soft magnetic properties of the material under microwave frequency. However, the metallicity of the thin films makes the application of the materials difficult.In this thesis, we employ the direct current magnetron sputtering to grow the continuous thin film of FeCoNbCuB and the photolithography dissection technology to fabricate the graphical thin film of FeCoBSi. By the analysis of the basic structure, static magnetic and the magnetic conductivity of the two kinds of thin films, the effect of the heat process on the electromagnetic properties of the thin film and the basic principles of controlling the electromagnetic properties of the patterning high magnetic conductance films were studied, as well as the optimization in the related technologies.The resultant data shows that as the continuous film of FeCoNbCuB, the heating process can make the thin film crystallization and the magnetic resonance frequency tend to be lower. In this process, appropriate temperature could increase the microwave magnetic conductivity of the thin film. After the treatment under the annealing temperature of300℃, the microwave magnetic conductivity of the thin film increases a lot from320to540comparing the untreated. While when the temperature goes up to above500℃, the high temperature can oxidate the thin film and result in non-magnetic phase, which will apparently reduce the magnetic conductivity of the thin film.On the other hand, as the thin film of FeCoBSi, after the patterning of the thin film, the saturation magnetization and microwave magnetic conductance will reduce while the in-plane magnetic anisotropy and coercivity increase. Furthermore, comparing to the continuous film, the resistivity of the patterning film is also dramatically enhanced. Additionally, the process of patterning will introduce lots of magnetic phase and heterogeneity into the thin film, which could increase the damper factor and the width of magnetic resonance spectrum of the thin film. In addition, the natural resonant frequency of the patterning film could shift to the high frequency and it turns resonance into relaxation.In the external field, the uniaxial anisotropy make the thin film of FeCoBSi has high rectangular rate on the preferred direction of the magnetization and low coercivity on the difficulty magnetized direction and meanwhile the natural resonant frequency of the graphical FeCoBSi film will goes up and improve its intensity.