A Kind Of Mems Micro Gas Chromatographic Separation Column Performance Optimization

Chromatographic analysis is a kind of technology for separation and identification of the mixed gas components, and has been applied in the middle of the twentieth century. Chromatography is widely used in compounds separation and analysis, etc. Compared with the conventional separation columns, MEMS gas chromatography columns are more favorite due to its smaller two-dimensional structure and the ability for fast separation such as high separation efficiency, analysis speed, low power consumption. And, MEMS gas chromatography columns are suitable for in-field detection of toxic or harmful gases.This dissertation based on the chromatography field, introduced in detail the microfabricated columns for gas chromatography research progress and the material and structure of its layout of classification, states the thermodynamics based plate theory and related knowledge. By the DRIE etching and anodic bonding technology, the ultimate design solution is concluded with serpentine columns,1m long,150μm wide,300μm deep, which can be divided into the open tubular and semi-packed column. The static coating is chosen for this study, PDMS serves to be the stationary phase, and its thickness is easier to calculate with coating liquid concentration.Finally, the microfabricated columns has been completed, the stationary phase coating platform has been set. In100℃isolate temperature working mode, mixture of acetone, ethanol, toluene and DMMP can be effectively separated by these microfabric-ated columns, and the retention time of DMMP is2.670min.