Test And Analysis Of The Diffraction Efficiency Of Plane Grating

The diffraction efficiency of grating quality is a most important technical indicators,has the important influence of energy transmission characteristics of diffraction efficiencyof spectral instrument. Diffraction efficiency of detection level is not only is an importantsymbol of the overall development level of grating mark, also affects and restricts thedevelopment of the grating in the very great degree.Measurement of grating diffraction efficiency are generally two kinds of methods,namely "line" and "continuous scanning method". Among them,"belongs to the manualmeasurement method of spectrum method", is a light source with known standard spectra,the spectral line lighting premonochromator output a plurality of standard wavelengthmeasured grating and standard mirror, relative diffraction efficiency correspondingwavelength values are pointwise measurement, the measured value was connected into therelative diffraction efficiency curve "line" method; this method of wavelength accuracy isusually high, but, due to restrict the number of spectral line wavelength standard can beused by the relative diffraction efficiency, measuring only a few discrete wavelengths."Continuous scanning method" is generally implemented in the automatic measuringdevice, measuring the whole process fully automatic control by measuring instrument,after can give the relative diffraction efficiency relative to the wavelength of thecontinuous curve, can reflect the abnormal phenomena of grating includes a gratingRayleigh anomaly and the resonance anomaly, can make the user have a grating veryintuitive understanding, the grating performance required and, the method of measuringspeed is faster, but also can eliminate the influence of measurement error caused byfactitious factors. Therefore,"an advanced measurement method of continuous scanningmethod" in line with the development trend of the measurement of the diffractionefficiency of grating.In this paper, using the national "eleven five" science and technology supportingmajor projects--results of research and development of high resolution optical devices,relative diffraction efficiency in the use of the grating diffraction efficiency of automatic test instrument to measure the grating and analyze the measurement performancemeasurements and instruments.This thesis is mainly divided into three parts.First of all, introduce the history of diffraction grating, basic characteristics, mainperformance index and test method.The second part, the design process in detail the efficiency testing instrument opticalsystem. The light source system, lead single The specific structure and performance indexof instrument system, measurement monochromator system and receiver are discussed indetailThe third part, the diffraction efficiency tester for actual measurement of grating,diffraction efficiency curves scale grating, and compare. Finally, analysis was performed tomeasure the performance of grating efficiency instrument. The measurement results areexpected to reach.Analysis shows that the diffraction efficiency of the grating, different scales in thesame wavelength incident light is different, the diffraction efficiency of a grating underdifferent wavelength of the incident light is different, influencing factors of grating relativediffraction efficiency measurements of density grating, reflectivity mirrors, the wavelengthof the incident light and the instrument itself. Stability and so on, through analysis,performance measurement of grating efficiency instrument is good, has achieved theanticipated target.