Improved Biomimetic Micro Pump Structure And Its Output Characteristic Research

The atomization and control of micro-fluidics take the core part in Miniaturized Total Analysis System (μ-TAS). As the support of micro-fluidics atomization, micro-pump wild used in many flieds such as micro chemical industry, biological engineering, drug delivery and medical diagnostic analysis is the "beating heart" in Micro Total Analysis System.In this work, a micro-fluidic pump with speed controllable had been made basing on the plant ranspiration which can promote the transport of water in the plant. A MTAS was assembled by the micro-pump and micro-fluidic chip to control the speed of micro/nano fluid. The relation between humidity and speed of micro-pump in different humidity was tested. The plant ranspiration was also studied in the aspect of micro-fluidic speed. The main issues are as follow:(1) A micro-fluidic pump with speed controllable had been made and improved. The assembly, sealing, output and institution controlling the speed of micro-fluidic pump were optimized respectively. The core part of micro-fluidic pump was fabricated by agarose gel electrophoresis. The micro-porous film with the range of SU-8glue was made by mask lithography process and membrane stripping technology, which was copied the pore sizes and distances of plant leaf. At last a PDMS micro-fluidic chip was bonded by casting the PDMS onto a chip with micro channel.(2) The atomization system of micro-pump and speed control equipment were set up to fabricate the PDMS micro-fluidic chip. The stability and controllability of micro-pump were tested to change the number of micro-pores in ranspiration with changing the area covered by silica gel film, consequently to analysis the relation between the speed rate of micro-pump and ranspiration.(3) An experiment had been taken to test the speed rates of micro-pump in different humidity. The saturation salt solutions mixed in room temperature were used in micro atomization system to test the speed rate and stability of micro-pump in different humidity, and other reasons which could influence the speed rate were also studied.It can be seen that in general environment the optimized micro-pump exhibited a stable and nano speed rate which could been controlled by changing the number of ranspiration micro-pores. The speed would been accelerated by0.08nl/s with adding30ranspiration micro-pores, and the biggest speed was0.9nl/s. It also can be seen that the humidity influence the speed rate of micro-pump with a linear relation. In the humidity of30～100%RH, the humidity rise1%with the speed of micro-pump was decreased0.0091nl/s.