The Motion Control Of The Piezoelectric-Actuated AFM

Nanometer technology has exerted a profound impact on modern technologydevelopment, and Atomic Force Microscope (AFM) has played an important role in thenanometer technology. In addition, in the nano level, piezoelectric actuator is consideredto be the best driver of the AFM.In this article, after analyzing and studying the piezo-driven AFM’s feasibility,author presents the dynamic model of this system. At first, the nanotip and the sampleare considered as lumped muss points. After force analysis, the DMT model is proposedto describe the interactional force between the nanotip and the sample, and the nanofriction is represented by the LuGre model. Then, the author researches the hysteresis ofthe piezoelectric actuator and gives the model of the piezoelectric actuator and themodel of the piezoelectric actuated AFM. After that, the Lyapunov theory is applied todesign a series of controllers, including the position motion PD control, position motionsaturated PD control, feedback linearization based trajectory tracking PD+control andthe adaptive control. Finally, the stability analysis of the control laws is carried out andMATLAB is used to get the simulation results.