The Design And Simulation Modeling Of Compliant Mechanism Of Micro Scanning Mirror

Scanning and reflection mirrors are crucial components of camera to get light pathturning and reasonable layout of the transducers, meanwhile they act as the executionelement to compensate the image-moving error caused by the movement of the camerawhen it takes dynamic photography. Therefore, the performance of scanning mirrorcomponents has a direct impact on the quality of images taken by cameras. In recentten years, many people have did much work on reflection mirror systems, which aresuccessfully used in the fields as: Laser Imaging, laser imaging radar, misaligned lightbeam correction, spatial optical communication beam alignment, etc. Studies aboutscanning and reflection mirrors system include: suspension element design, weightdesign of reflection mirrors, integration intelligence system of servo controlling, brake,drive, sensor and so on. Learning the achievements on mechanical structure by bothdomestic and oversea scientists, most of them are rigid, and contains rigid-pivotswhich seriously impacts the accuracy of movement because of inherent friction andgap. So lubrication is significant, but it couldn’t be come true in some extremeenvironment, like the outer space. Moreover, some mechanical design are based oncompliant components, however, the rotations of the two shafts generate some crosscouplings, leading control difficulties and decrease of motion accuracy. For the aspectof ensuring the quality of scanning mirror image，the strategy of using compliantmechanism to realize the suspension of mirrors is proposed, then design and analysisof compliant mirror-suspension mechanism are key work in scanning mirror systemsresearches. In this paper, considering the utility of scanning mirror and compliantsuspension members, a design of compliant suspension mechanism for scanning mirrorwith two rotary axles based on compliant joints element is put forward, and after thelearning of the structure of it, torsional behavior of the compliant mirror-suspensionmechanism is discussed. At last through the modeling, analysis and simulation of thefull compliant mirror-suspension mechanism with two rotary axles, excellentperformances are obtained, like light weight, accuracy movement, low cross coupling,large output-angle, stability of rotation center, low power consumed, easy machiningoperation, simple assembling, etc.After the introductions of the material and mechanical characteristics of shapememory alloy, as well as merit and demerit of compliant and its design methods, in this paper we choose NiTi which has shape memory effect as the driver, and give thedynamics model and analysis of the driver.At the end of the paper, the main conclusion and innovations of the work isdiscussed，that is the design of full compliant scanning mirror suspension mechanismwith two rotary axles, and drive and control method of it. The compliant mechanismpresented has the reduced weight and volume, and the crucial property as low energyconsumption, large range of motion, high precision and low cross coupling, whichcould take camera well performance and convenience to people’s life.