Research And Application Of Nano Metrology System With Laser Focus Probe

Nanotechnology is wildly considered that is the most important one of scienceand technology in new century, and it will lead a new industrial revolution. As a newcross discipline, it relates to the mechanical, optical, electronic, information, physics,chemistry, materials, manufacturing, biological and other disciplines, so itsdevelopment will promote the development of these disciplines.Nano geometry measurement technique differs from nanotechnology, as a kindof metrology technology, it must have the following characteristics:1) traceability;2)A metrological coordinate system;3)Repeatability of the relative to metrologicalcoordinate system of nano measurement;4) detecting system will be assembled on themetrological coordinate system. It shows that the key of nano metrology system is theprobe system and coordinate positioning system with traceability.The main work of this paper is to carry out a series of measurement experimentby the nano measuring machine assembling with a laser focus probe. Through theresearch of the various phenomena which happens when the measurement is going on,the selection of suitable object, the avoidance of abnormal situation in measurementand assessment methods of measuring errors and other aspects of the performance ofmeasuring system are defined.Firstly, the paper gives detailed analysis about principle of the structure fornanometer positioning machine assembling with a laser focus probe.It includes thatanalyzsis of nano positioning machine jiggle platform structure and data processing ofelectrical unit control system, and working principle of four quadrants photoelectricsensor with focusing error signal generator in the laser focus probe and analysis of itsworking characteristic curve in details. It takes a conclusion that specificmeasurement performance of the nano measuring machine which is composited ofnanometer positioning machine and a laser focus probe, and gives its position in themeasurement traceability system, and the possible source of errors in themeasurement process is discussed.Secondly, during actual experiment, a variety of measuring the phenomenon hasbeen detailed analysis, such as the abnormal phenomena of laser scanning, reflectivityand refractive index causes measurement error,and bat wing effects were discussedand researched. Especially, the paper take programming in MATLAB to analyze and evaluate bat wing effect range of measurement. At last, what objects is suitable forusing the laser focus probe are given, and draw a conclusion about the performanceand the application of the nano measuring machine.Finally, this paper carried out a series of experimental measurement, accordingto international standards, building step high evaluation mathematical model, usingthe method of least squares regression equation of step height, in order to achieveMATLAB programming linear regression equations, and the the computation ofone-dimensional and two-dimensional grating for deflection angle put forwardeffective measurement and verification method. The final taking step high180nmreference model as an example, launched into a detailed assessment of the uncertaintyof measurement, through the international comparison of EN valuation method on theassessment of the uncertainty of measurement were evaluated, the results wereexcellent.