Structural Design And Analysis Of Miniaturized Active Vibration Control System

Active vibration control system is the necessary guarantee for the generation ofprecision in precision manufacturing and metrology equipment. The micro-vibrationneeding to be overcome in precision vibration isolation system has the characteristics ofbroadband, slight value and complex source. All of these posed tremendous challenges onthe structure design and active control of precision vibration isolation system. Passivevibration isolation unit and sensors, actuators can be combined to form an active vibrationcontrol device. However, due to the size of sensor and actuator, this active vibration controldevice is too big to meet the needs of micro precision vibration damping for smallequipment. Therefore, it is necessary to design a compact and highly integrated precisionactive vibration damping device.Base on the analysis of piezoelectric material performance, this article takes thepiezoelectric ceramics as the active vibration damping element. According to therequirements of active vibration damping, a piezoelectric block structure with high-levelintegration has been designed and made.Propose the concept of integration of the system mechanical structure design andprocessing. According to the requirement of passive vibration isolation and active vibrationdamping, the mechanical structure design of passive and active part has been carried onrespectively. Use FEA to verify the reliability of the structure.Build test platform and design the plan to carry on the experiment of the systemplatform. Modal test and passive isolation transfer ratio test have been taking to analysis theperformance of the system.