Preparation Of Sillicon Based Thin Film Solar Cells Materials And Study On Their Properties

The solar cells is a new industry in China, which developing very sharply in recent years. The higherperformance price ratio of a-Si and poly-Si thin film solar cells in silicon based solar cells was verifiedthrough the development of this field. The silicon thin films have been prepared by magnetron sputteringmethod in order to get scientific datum needed in the process to deposit high quality device-1evel films byoptimizing the processing conditions. The magnetron sputtering is a simple, fast film. The depositionmethod, which can deposit doped silicon thin films without the usage of toxic or flammable gases, instead,use the polycrystalline as target to deposit films by Ar+sputtering．Compared to other film-depositiontechniques, the magnetron sputtering is a promising silicon thin film solar cells fabricating method for itshigh deposition rate and thus induced captivating economic efficiency. In the eyes of the author, thismethod is hopeful to reduce the cost of solar cells dramatically.With the further research into the third generation solar cells—thin film solar cells, to fabricate highquality polycrystalline silicon(poly-Si)thin films is a most straight approach to improve the photovoltaicconversion efficiency. In this thesis, the fabrication of high quality poly-Si thin films is investigated．In thisdissertation, poly-Si thin films were successfully fabricated using aluminum induced crystallization (AIC).At the start, amorphous silicon(a-Si)thin films were prepared by the radiofrequency magnetron sputteringon glass substrates, after that, aluminum thin film Was deposited over a-Si min films using theradiofrequency magnetron sputtering, then the samples were annealed in Ar atmosphere with variousannealing parameters．The silicon thin films deposited by the magnetron sputtering are characterized byAFM and X-ray diffraction before and after annealing．...