Research On Preparation Of N~+Emitter Using The Spin-on Doping Method And The Enhancement Of The Absorption Of Light Using Plasmon Resonance On Amorphous Silicon

The direction of development in crystal silicon solar energy cellmanufacturing industry is to reduce the production cost and increasethe efficiency of conversion. One of the cost reduction methods is tomerge two preparation steps into one without reducing theperformance of silicon solar cell. Plasmon resonance is used toenhance the light absorption and scattering characteristics which isbenefit to improving the conversion efficiency of solar cells. In this paper,we used the spin-on doping (SOD) method to finish the two tasks,phosphorus doping to prepare n+emitters and anti-reflection coating.At the same time, Magnetron sputtering method was used tofabricating the silver nanoparticles film on the substrate, themicrostructure and optical properties of silver nanoparticles film havebeen studied. The main contents include:1. Different from commercial SOD phosphorus source solutions, weused different concentrations of phosphorus acid to prepare SODsolutions that make use of the property of tretraethylorthoslicate (TEOS)as the phosphorus doping source. We investigated the effect of theconcentration of phosphorus acid in the solution on the sheetresistance of n+emitters. Moreover we study the influence of thermaltime and temperature on sheet resistance. It is found that the sheetresistance of the n+emitters can be tuned by changing these threefactors, which shows that the SOD method provide a easieroptimization process to forming n+emitters. The SiO2films were foundafter thermal diffusion process. And then study the antireflectioncharacteristics of the SOD films, found that the film can certain reducethe reflection.2. The silver nanoparticles films were prepared by magnetronsputtering method and low temperature annealing treatment. By changing the different thickness of the silver film, we study the surfacemorphology and different optical properties of the silver nanoparticleswith different thickness. And also investigate the impact of differentannealing time on surface morphology and optical properties of sliverfilms. It is found that different thickness of silver nanoparticles andannealing time can clearly effects the optical properties of the films. It isconcluded that the size and the shape of the metal nanoparticles is themain reason to change the light absorption and scattering. And whenthe silver nanoparticles films were wrapped in the a-Si thin films, it canalso optimize the optical properties of the a-Si thin film.