| For testing angle velocity, testing system of micromechanical gyroscope is appliedwidely in both military and civil areas, and it is provided with broad foreground of evolutionand application，the performance of interface circuit can influence testing precision ofmicromechanical gyroscope system directly, so interface circuit of capacitancemicromechanical gyroscope is the emphases in this paper. The interface circuit include twopart, driving-circuit and detecting- circuit.Firstly, development status quo and development current of micromechanical gyroscope indomestic and domestic are introduced, the interface circuit is investigated abecedarian, too,and the primary aim and meaning are expatiated. Then, basing the dynamics theoretical of thecapacitance micromachined gyroscope, the equivalent electrical model of its driving mode anddetecting mode are established, and using Pspice emulator software, by carrying through ACsmall signal analysis, the sensitivity degree and bandwidth of micromechanical gyroscope areanalysed, and the parameters, such as driving frequency and matching voltage of mode areoptimized.Basing on the theoretics, both adscititious AC driving circuit and self-excited drivingcircuit are desinged, and every module is simulated and tesing, and combine with equivalentelectrical model of driving mode in Pspice, the feasibility of self-excited driving circuit arevalidated.Then,the design and testing of detecting circuit are carried out.In this course, detectingcircuit of static state capacitance is come true firstly, then by the way series-woundcapacitance the feasibility of detecting circuit is validated, the testing precision is 10-17F.Then，for testing dynamic angle velocity, the circuit is ameliorated and analysed.The last, for implementing the integration and melioration of the circuit, the mix deep filmintegration experiment carried through, the driving ecircuit and detecting circuit are integratedand testing analysis, and precision of the circuit is increased. |
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