Preparation And Characterization Of Me-Si-N Films

In this paper, a series of Me-Si-N films (Hf-Si-N、Zr-Si-N) were deposited by magnetronsputtering and ion beam assisted deposition technology. In order to investigate the influenceof silicon content on the microstructure and properties of the films, the surface morphology,microstructure and phase structure was studied with SEM, AFM, EDS, XRD and XPS,respectively. The nano-mechanical properties, friction and wear properties and corrosionresistance were studied with nano-indentation test, friction and wear test and electrochemicalsystem. The biocompatibility of Me-Si-N films was investigated by the protein surfaceadsorption test and platelet adhesion test. The surface energy of Me-Si-N films with differentsilicon content was investigated by contact angle test and first-principle calculation.The microstructure and phase tests show that with the addition of Si element, Me-Si-Nfilms begin to refine the grain and reduce the roughness of the films and the films consist ofSi3N4phase and MeN phase.The friction and wear experiments show that the friction coefficient of Hf-Si-N filmsincrease with the time increasing. Moreover, with the addition of silicon element the frictioncoefficient of Hf-Si-N films increases firstly and then decreases, but they are all lower thanthose of the substrate. The Hf-Si-N films have good wear resistance.The corrosion resistance tests in simulated body fluid show that with the addition of Sielement the corrosion resistance of the films increases firstly and then decreases. For Zr-Si-Nfilms, the film with Si content of8.32At%has the best corrosion resistance. While forHf-Si-N films, the film with Si content of6.99At%has the best corrosion resistance, andspontaneous passivation takes place which show that the films can effectively protect thesubstrate.The biocompatibility experiments show that the Me-Si-N films have betterbiocompatibility than the substrate. Both the Zr-Si-N films with8.32At%Si and the Hf-Si-Nfilms with6.99At%Si have good biocompatibility and among which the latter are better.The contact angle test and first-principle calculation show that with the addition of Sielement the surface energy increases firstly and then decreases.