Nowadays, Ultra-precision machining technology has become an important pillarto develop modern high-tech manufacturing technique. It has been widely used toprovide key technical support for producing high-end products. For example, to processthe machined part of non-rotating symmetric optical free-form surface. These opticalelements have complex surface shapes and require higher machining accuracy, sotraditional processing methods can not meet the requirements. While single pointultra-precision diamond turning can certainly satisfy the need to process these element.The key of single point ultra-precision diamond turning is that it is equipped with fastresponse capacity of micro-feed tool servo (FTS). The research of this paper is based onMaxwell force fast tool servo which belongs to the ultra-high frequency response of theelectromagnetic drive of a normal stress micro feed mechanism, it’s mean content is asfollow.Firstly, the paper introduces development and its application of the ultra-precisionmachining technology at home and abroad, meanwhile it introduces fast tool servowhen in the study of ultra-precision single point diamond turning technology andanalyzes four different driving principles and their advantages and disadvantages of thismechanism.Secondly, the paper analyzes the basic principles of Maxwell FTS, raises the meanquestion existing in it, and researches the institutional model of existing stresselectromagnetic drive, so as to lay the foundation for establishing a new agency model.Thirdly, the paper studies the issues of nonlinear Maxwell fore and the design ofthe air gap and the flexible hinge, then studies a new drive mechanism model of themagnetic field distribution and analyzes the feasibility of the linearization of the drivingforce according to the principle of magnetic circuit design theory, then analyzes theoptimal value of the working air gap on the basis of ANSYS finite element software,and last studies and designs the flexible hinge.Fourthly, according to the above basic theory researches, the paper draws theoverall schematic diagram of the drive mechanism, then designs the parts diagram ofthe drive mechanism and depicts the machining and assembly process detailed.Fifthly, the paper studies the cross-leaf spring modal in order to get it’s naturalfrequencies and vibration modes, then determined the drive frequency range accordingto the natural frequency. At last the paper studies the dynamic simulation of the electromagnetic driving force. |