Research On9V/3500A Electrolytic Power Supply With Air-cooling

NF3is a colorless, tasteless,poisonous and non-flammable gas. Its strong oxidation ability can be used as a rocket propellant fuel oxidant. When mixed with certain gases, it can be used for the etching of the silicide in the plasma process. Today, as the semiconductor etching and cleaning agents, NF3has been widely used in the electronic industry. With the rapid development of the world’s electronic industry, in order to meet the growing demand for output and quality, world manufacturers are actively engaged on the research of NF3, and on improving their productivity.In the electrolytic production of NF3, the conventional thyristor water-cooled rectifier was used as power. However, since its conversion efficiency is low and the radiator is vulnerable to corrosion, its efficiency and reliability of power supply are seriously affected. All of which is not consistent with the energy conservation policy.To overcome the shortcomings of the traditional water-cooled power supply and reduce energy loss in the electrolytic process, this paper does a lot research in characteristics of NF3production, and put forward a propose by using PSC-FB-ZVS-PWM converter as the main circuit topology of electrolytic power supply, in this way radiator corrosion caused by air-cooling is reduced, and the efficiency, reliability and thermal stability will be greatly improved.From the perspective of power electronics, this paper illustrates the development and research of electrolytic power supply at home and abroad. Design scheme is put forward when considering NF3preparation, the electrolyzer and "polarization" effect have on switching power supply. Besides this paper also elaborates on the principle of the PSC-FB-ZVS-PWM converter, and discusses about the conditions of soft switching and the duty cycle loss of the secondary voltage. From which presents the selection process for the detailed calculations of the main electrical circuit power devices; promotes that DSP TMS320LF2407and interactive interface of touch screen to be used as core of control program. Simulation by MATLAB/Simulink is passed when combined people-machine control projects. Meanwhile, the paper analyzed the constraints of air-cooling mode, and based on the calculation of the circuit losses, reasonably designed a air-cooling system which is certificated in the ANSYS Workbench/Icepak thermal simulation.In the end, through functional test and thermal stability test of actual9V/3500A prototype, the design is proved to be a correct and reasonable one.