Research On Properties Of TiVCN Composite Films And TiN/VCN，TiCN/VCN Multilayer Films

A series of TiCN nano-composite films with different carbon content，a series of TiVNand TiVCN nano-composite films with different V and C content，a series TiN/VCN andTiCN/VCN mutilayers with different modulation periods were prepared by multi-targemagnetron sputtering technique. The microstructure and properities of these films wereinvestigated by means of X-ray diffraction, CSM nano-indentation and high-temperatureball-on-disc tribometer.The studies on the TiCN nano-composite films indicated that, with the increase of thepower of graphite target, the peak of TiN（111） became broaden while the size of the grainbecame smaller, and the structure closed to the amorphous structure eventually. Along withcarbon join, the films were harden and the hardness and young’s modulus increased. Whenthe power of graphite target was90W, the two parameters reached highest,28.2GPa and230GPa, respectively. Investigations on the tribological properties revealed decreasingfriction coefficients with increasing power of graphite target. When the temperature reached300℃to500℃, the friction coefficient of TiCN films increased. The friction and wearproperties of TiCN composite film is influenced by the microstructure, water vapor andoxygen in the air, the ambient temperature and a series of factors.The studies on TiVCN nano-composite films indicated that, the hardness values ofTiVN and TiVCN films reached a maximum at a vanadium target power of60W andgraphite target power of20W, respectively. With the further increase of C, the hardness ofTiVCN films decreased gradually. At room temperature, the friction coefficients of TiVCNfilms decreased with the increasing power of graphite target. At high temperature, thefriction coefficients of TiVCN showed a up-down-up curve with the increasing of testtemperature. The effects and adaptive mechanisms of Magnéli phase formed in TiVCNfilms at high temperature were discussed.The studies on TiN/VCN mutilayers indicated that, nanocrystalline with δ-NaCl fccstructure and amorphous structure exist in TiN/VCN multilayers. The highest hardness ofTiN/VCN multilayers is28.71GPa, which is about23%higher than the value calculatedfrom the rule of mixtures. The hardening mechanisms in this system are discussed. Thefriction coefficients of TiN/VCN multilayers at room-temperature is close to monolithic TiNfilms. But when the temperature reach to700℃, coefficients of multilayers is lower thanmonolithic TiN films. The lubrication mechanism of Magnéli phase （V₂O₅） on the view ofcrystal chemistry and thermal measurement methods. The studies on TiCN/VCN mutilayers indicated that, The hardness of TiCN/VCNmultilayers is close to the value calculated from the rule of mixtures, super hard did notappear. The friction coefficients of TiCN and VCN films are very low in room-temperature.The friction coefficients of TiCN/VCN mutilayers are higher when their modulation periodsare small. And, when their modulation periods are more than10nm, The friction coefficientsof TiCN/VCN mutilayers will be close to TiCN and VCN films. When the temperaturereach to700℃, The friction coefficients of TiCN films is depending on TiO2, The frictioncoefficients of VCN films is depending on V₂O₅, The friction coefficients TiCN/VCNmutilayers are depending on TiO2and V₂O₅. Compareed to TiCN films, The frictioncoefficients of TiCN/VCN mutilayers had been some decrease.