Preparation And Performance Evaluation Of Thermal Curing Fixed-abrasive Pad

With the development of the industry of semiconductor and optics, demands for ultra-smoothsurface components are growing, meantime requirements for surface quality are growing. As atechnology to abtain ultra-precision and high-quality surface, fixed abrasive chemical mechanicalpolishing technique (FA-CMP) is more widely used.In this paper, thermosetting FAP is developed, and also do researches about performances ofthermal curing FAP. The main work and results on thermosetting FAP are as follows:And finally, the further work on the theory and technology of FAP is prospected.(1) Research on preparation mechanism of thermosetting and hydrophilic FAP has been done,developed a radical polymerization curing FAP formulation. And analysis effects of processparameters such as mixing speed, mixing paddle shape on uniformity of the polishing pad, obtaina suitable preparation parameters. Design the surface structure of FAP and mold, producelaboratory and factory production mold,at last stable performance thermosetting Fixed abrasivepolishing pad is prepared.(2) porosity, swing-type hardness, abrasive retaining ratio, mortar wear rate and swelling ratiowere selected as matrix properties of thermosetting FAP. Through single-factor experiments,therelationship between FAP indicators and processing properties were obtained. Results show thatmaterial removal rate(MRR) rises with increase of swing-type hardness, within a certain range ofhardness MRR is proportional to the mortar wear rate, high porosity is conducive to improving thequality of the workpiece surface.(3) Design and describes the overall structure of the image processing system and the variousparts, made light and lighting devices, image capture devices and polishing pad positioning devicedesign, and image processing software is developed by using MATLAB, the results show that theresults is close to PS manual processing results within5%error, identify the fast and easy tooperate.(4) The issues to be addressed in applications for the industry, MRR sustainability andstability of surface quality, respectively,The affection between copper content and theself-conditioning capability of FAP was analyzed, results show that the increase in copper contentdidn’t cause significant MRR improve, but the increase in copper content processed to improvethe sustainability of FAP. Also the processing performance was analyzed with the changes ofdiamond content in double-abrasives FAP, results show that in a certain range of diamond content,the growth of abrasive wouldn’t bring significant changes to the MRR, but the double-abrasiveFAP can get excellent results. (5) Combined with laboratory experiments, thermosetting hydrophilic double-abrasive FAPwas prepared which is suitable for crystal (crystal glass). The processing affections of surfacestructure and porosity were analyzed, results show that t the FAP with salients was not suitable forprocessing crystal, it caused serious side collapse phenomenon; and about20%porosity wasconducive to crystal processing, both to ensure the mechanical strength of FAP, but alsoguarantees the stability of processing quality.