Study On Coatings Prepared By Magnetron Sputtering

Coatings are adhered to the substrates, and usually coatings and the substrates vary inchemical composition or microstructure. The coating-substrate system often behavemuch better in some properties than the substrate or the coating only. Coatings arewidely applied and good coating-substrate adhesion is a key requirement wherevercoatings are used. In this paper, metallic coatings and ceramic coatings are depositedon the substrate of#45steel by magnetron sputtering, and the influence of thesubstrate hardness on the coating-substrate adhesion was detected by means of scratchtest. The results show that the coating-substrate adhesion increases which the increaseof substrate hardness almost linearly for both Zr and ZrN coatings.In recent years, some researchers developed the properties of ferroelectric thin filmsby fabricating multilayered films or superlattice films, which has attracted intensiveattention. PbTiO₃and PbZrO₃show similar crystal structure, matching crystal latticeand low interfacial stress. In this paper, single layer films and multilayered films weredeposited onto ITO glass with PbTiO₃and PbZrO₃targets by magnetron sputtering. Aseries of single layer films and multilayered films are prepared by changing sputteringsequence, sputtering time and sputtering power. The structure and properties of thefilms were characterized by means of UV-vis, XRD, SEM and EDS.AlN films show several outstanding physical and chemical properties, such as highthermal conductivity, good refractive index and good chemical stability. In this paper,AlN were deposited on quartz glass and ITO glass by magnetron sputtering. Theproperties of AlN coatings were examined by EDS, XRD, thermal conductivityanalyzer and UV-Vis absorption spectra. The results show that AlN deposited onquartz glass and ITO glass are amorphous, AlN coatings improve the thermalconductivity and present good refractive index.