Electro-chemical Micro Machining Using Sub-micron Electrode

With the rapid development of science and technology, Micro Electronic Mechanical System(MEMS) is being more and more widely used in our social life. Micro manufacturing technique is thekey manufacturing technology in MEMS and micro parts production, which is one of the most activefields in the manufacturing technique. Micro Electrochemical Machining removes metal materialswith iron form regardless of hardness of materials. There is also no cutting force and cast layer in theprocess, which means Micro Electrochemical Machining is sure to have huge application potential inMEMS.Research works were listed as follows:(1)The sub-micron tool electrode was prepared in line. The liquid film method and immersionmethod were studied, which were used to prepare the electrode. And the tungsten electrode insubmicron scale was successfully prepared.(2)The method of tool setting based on the transient current detecting was presented. Afteranalyzing the reason of bending deformation and electrical discharge of the submicron tool electrode,this paper presented the method based on the transient current detecting for tool setting and studiedthe effect of the feed speed to the accuracy of tool setting.(3) The tool setting system based on the visual and the transient current detecting was developed.This system could help the sub-micron electrode moving to the surface of workpiece in high speeduntil the distance between electrode and the surface of workpiece was smaller than dozens of micron.Then the location where the submicron electrode contacted with the workpiece was judged bytransient current detecting, achieving fast and accurately tool setting.