Stark Broadening Of Emission Spectrum In Pin-plate DBD At Atmospheric Pressure

Non-equilibrium plasma have widely been used in environmental protection, surface modification, microelectronics industry, nanometer material preparation, new energy development, radiation light source and many other industry fields. Plasma diagnosis helps us understand the internal particle’s composition and content, thermodynamics parameters such as temperature and energy distribution. It also can get relevant information of collision, energy transfer, dissociation, ionization and transportation in microscopic physics process. But now each diagnosis method has its limitations. There is no method applicable to all system. Emission spectrometry as a kind of nonintervention discharge system method can conduct real-time detection is in favor of researchers.Combining with the national natural science fund projects "Study on atmospheric pressure non-equilibrium plasma spatial and temporal scale effect" (Item number:50877005), we get single micro-streamer discharge in pin-plate DBD. The electrophysiological properties and optical radiation characteristics of discharge are compared and analyzed. Add a small amount of Argon into air, collect Argon 418.188 nanometer spectral line by monochromator, this spectral line is Voigt line style convolved by Lorentzian line shape and Gauss line shape. After getting the Stark Broadening, we calculate the electron density whose order of magnitude is 1015cm-3. We establish a feasible experiment method, use Stark Broadening on diagnose in narrow gap DBD.In this thesis, we diagnose electron density through Stark Broadening characteristic, finding that Stark Broadening and electron density increases with the driving voltage’s increase, decrease with the thickness’s increase of dielectric layer, stay the same with the changing of discharging gap. The reason is stated by analyzing the effects of discharge structure and driving voltage on particle stimulate ionization degree. Discharge image is taken by CCD camera. The conclusion by observing light intensity in different discharge structure is corresponding with the conclusion got from Stark Broadening.