Study On Fabrication, Characterization And Pattern Of PZT Thin Film

Lead zirconate titanate(PZT) piezoelectric thin film is a ABO3perovskite structurecompound, which consists of three elements, such as: Pb, Zr, Ti. It possesses excellentpiezoelectric, iron electricity, dielectric and pyroelectric performance. It is so animportant functional film material that widely used in microelectronics, photonics,MEMS and other fields. In this paper, the PZT piezoelectric film is used inmicro-energy collector and study on each tache of fabrication PZT piezoelectric film bySol-Gel process. We solve the problem of PZT film cracking and the thickness of thecrack-free PZT film is1～3.5μm. The XRD shows that the crystal of the film is (110)orientation. The main content of this paper is as below:①Study on the PZT piezoelectric film fabrication process flow by Sol-Gel method,which include: the preparation of PZT precursor solution, gelatinize technics, heattreatment technics and film polarization. In order to get high quality PZT film, weoptimize these technical parameters;②Study on the characterize method of the process of fabrication PZT film. First,characterizing PZT precursor solution by infrared spectrum, which could help to analysethe condition of their precursor solution; Second, characterizing PZT piezoelectric film,which include:XRD characterization to ensure the crystal of the PZT film;SEMcharacterization to ensure the surface and cross-section morphology of PZT film;step-meter to measure the thickness of the film;③Study on the pattern method of PZT film. Study on the wet-etching method topattern the PZT film in detail. Discussed the pattern effect of three corrosion liquid. Theresult showed that the first corrosion made the best effect. And the corrosion rate isabout4.3nm/sec;④Study on PZT film piezoelectric properties test microstructure manufacturingmethod and process flow, which is a good foundation of making MEMS devices.This paper main study on the fabrication, characterization, pattern of the PZTpiezoelectric film, but our work still exsit some insufficiencies. The work we have donecould provide some beneficial reference for future work.